Control of indentation depth in nanomanipulation process to avoid damage of microparticles

Atomic force microscope is one of the most commonly used nanorobots that is used for various applications. Nanomanipulation is one of the most major applications. Maybe the indentation depth can be considered the most influential parameter in this process. For this reason, this paper discusses the control of indentation depth in Nanomanipulation process based on the atomic force microscope. To this end, adaptive fuzzy sliding mode control approach has been used. The used geometry for microparticles has been selected as oval and cubic. The findings of this research show that the level of indentation depth in oval geometry reaches the desired amount of 20 nm in less than 0.4 seconds and in cubic geometry, it reaches the desired amount of 26 nm at this time. Also, the indentation depth derivative level is controlled in less than 0.6 seconds.