Integrated LTCC chamber with optical ports and thermal control elements

This document shows the microsystem, made of LTCC (Low Temperature Co-fired Ceramic) material, for biochemical and chemical applications. The structure consists of a chamber, a glass window, an inlet and an outlet, an optical waveguide, a heater and a temperature sensor. The novel LTCC-glass technology is used to build the ceramic microreactor. The additional glass elements enable real-time, optical analyses. The integrated heater and the temperature sensor allow reactor to achieve required temperature. FEA (Finite Element Analyze) is applied to optimize thermal properties of the designed chamber. Furthermore, the electronic control system is constructed in order to obtain proper temperature profile.