9.8具有稳定电桥偏置补偿方案的3.7nV/√Hz高能效电桥读出IC

Hui Jiang, K. Makinwa, S. Nihtianov
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引用次数: 31

摘要

惠斯通电桥传感器经常用于精密仪器和测量系统,例如,用于μ k分辨率的温度传感器在晶圆步进器[1]和mpa分辨率的差压传感器在精密空气计[2]。由于它们输出叠加在大共模(CM)电压上的小差分信号,典型的桥式读出ic (roic)由仪表放大器(IA)和ADC组成[1]。本文介绍了一种低噪声节能ROIC,其输入参考噪声PSD为3.7nV/√Hz,功率效率因子(PEF)为44.1。后者是目前技术水平的5倍改进[3]。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
9.8 An energy-efficient 3.7nV/√Hz bridge-readout IC with a stable bridge offset compensation scheme
Wheatstone bridge sensors are often used in precision instrumentation and measurement systems, e.g., for μK-resolution temperature sensing in wafer steppers [1] and mPa-resolution differential pressure sensing in precision air gauges [2]. Since they output small differential signals superimposed on a large common-mode (CM) voltage, typical bridge readout ICs (ROICs) consist of an instrumentation amplifier (IA) followed by an ADC [1]. This paper describes a low-noise energy-efficient ROIC, which achieves a 3.7nV/√Hz input-referred noise PSD and a power efficiency factor (PEF) of 44.1. The latter represents a 5× improvement on the state of the art [3].
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