用干涉测量技术和机器视觉校正量块长度的变化

Pawat Phuaknoi, J. Buajarern, A. Tonmueanwai
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引用次数: 0

摘要

提出了一种测量量块长度变化的迈克尔逊干涉仪方法。该方法基于相移干涉仪测量量块测量面及其辅助板上干涉条纹的条纹分数。参考测量标准为稳定氦氖激光器的波长为633 nm,可追溯至国际标准的米。并用543 nm稳定He-Ne激光器对该系统进行了验证。干涉条纹图案由CCD相机观察,图像由机器视觉系统处理。使系统实现了自动运行。将测量结果与标准方法进行了比较,结果与不确定度相当。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Variation in length of gauge blocks calibration using interferometry technique and machine vision
A Michelson interferometer method for determining the variation in length of gauge blocks is presented. This method is based on phase shift interferometer measuring a fringe fraction of the interference fringes on a gauge block measuring surface and its auxiliary plate. The reference standard of measurement is the wavelength of stabilized He-Ne Laser at 633 nm which is traceable to the international standard of the metre. The system was also verified by the 543 nm stabilized He-Ne Laser. The interference fringe patterns are observed by a CCD camera and the images are processed by a Machine Vision system. This make the system run automatically and fulfill. The measurement results were compared with the standard method and they agree with comparable uncertainty.
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