H. Roth, Constantine Skordoulis, M. Schroedner, I. Stohn, A. Bolovinos, E. Bakalis
{"title":"用于微电子应用的聚合物中准分子激光诱导的永久导电位点","authors":"H. Roth, Constantine Skordoulis, M. Schroedner, I. Stohn, A. Bolovinos, E. Bakalis","doi":"10.1117/12.316612","DOIUrl":null,"url":null,"abstract":"It has been demonstrated that the laser irradiation of the specially synthesized polymer Poly(bis-alkylthio-acetylene)- PATAC induces the generation of highly permanently conducting sites in the material which remains an insulator in the unexposed areas. Conductivity changes by 16 orders of magnitude have been observed. The conductivity values of the final reaction products are in the level of a heavily doped semiconductor. These conductivity values make the PATAC coated materials suitable for microelectronic applications such as the laser direct imaging of conducting paths and circuit structures.","PeriodicalId":373160,"journal":{"name":"GR-I International Conference on New Laser Technologies and Applications","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Excimer-laser-induced permanent electrically conducting sites in polymers for microelectronic applications\",\"authors\":\"H. Roth, Constantine Skordoulis, M. Schroedner, I. Stohn, A. Bolovinos, E. Bakalis\",\"doi\":\"10.1117/12.316612\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"It has been demonstrated that the laser irradiation of the specially synthesized polymer Poly(bis-alkylthio-acetylene)- PATAC induces the generation of highly permanently conducting sites in the material which remains an insulator in the unexposed areas. Conductivity changes by 16 orders of magnitude have been observed. The conductivity values of the final reaction products are in the level of a heavily doped semiconductor. These conductivity values make the PATAC coated materials suitable for microelectronic applications such as the laser direct imaging of conducting paths and circuit structures.\",\"PeriodicalId\":373160,\"journal\":{\"name\":\"GR-I International Conference on New Laser Technologies and Applications\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-07-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"GR-I International Conference on New Laser Technologies and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.316612\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"GR-I International Conference on New Laser Technologies and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.316612","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Excimer-laser-induced permanent electrically conducting sites in polymers for microelectronic applications
It has been demonstrated that the laser irradiation of the specially synthesized polymer Poly(bis-alkylthio-acetylene)- PATAC induces the generation of highly permanently conducting sites in the material which remains an insulator in the unexposed areas. Conductivity changes by 16 orders of magnitude have been observed. The conductivity values of the final reaction products are in the level of a heavily doped semiconductor. These conductivity values make the PATAC coated materials suitable for microelectronic applications such as the laser direct imaging of conducting paths and circuit structures.