半导体暴露装置防振单元的系统辨识

Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328) Pub Date : 1999-08-22 DOI:10.1109/CCA.1999.801162

H. Kato, S. Wakui, T. Mayama, A. Toukairin, H. Takanashi, S. Adachi

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引用次数: 6

摘要

讨论了半导体暴露仪的系统识别问题。它具有多自由度机构，其中包括用于微振动控制的抗振单元。为了设计微振动控制器，需要建立机构的动力学模型。采用子空间方法，在较短的时间内实现了模型的实际构建。通过实验数据与传统的频率响应方法进行比较，对识别结果进行了评价。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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System identification of anti-vibration units in semiconductor exposure apparatus

System identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using a subspace method. Identification results are evaluated through experimental data in comparison with a conventional frequency response method.

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Proceedings of the 1999 IEEE International Conference on Control Applications (Cat. No.99CH36328)

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