{"title":"使用SU-8 2002用于聚焦控制的聚合物可变形膜镜","authors":"E. Dunbar, M. Leone, S. Lukes, D. Dickensheets","doi":"10.1109/OMEMS.2008.4607867","DOIUrl":null,"url":null,"abstract":"Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Polymer deformable membrane mirrors for focus control using SU-8 2002\",\"authors\":\"E. Dunbar, M. Leone, S. Lukes, D. Dickensheets\",\"doi\":\"10.1109/OMEMS.2008.4607867\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607867\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Polymer deformable membrane mirrors for focus control using SU-8 2002
Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.
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