基于PCBMEMS技术的电流体微离子光学离子选择孔

R. Willoughby, D. Fries, E. Sheehan
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引用次数: 0

摘要

本研究的目的是应用替代的(非硅基)微加工技术来产生大气压离子光学器件。我们已经为微离子光学系统设计了新的材料、工艺和设计,用于控制源内、跨孔径和电导阵列的离子。利用PCB-MEMS实现了流场和静电场成形的图案微结构和几何形状。我们设计和制造的层压板是基于液晶聚合物(LCP)的光可定义键合材料和各种电铸金属。PCBMEMS的选择是由低投资工艺的要求驱动的,这种材料能够实现高水平的电子系统集成,同时提供与玻璃竞争的真空兼容性。设计了用于流体流动控制的聚合物电介质成型工艺和用于电场控制的金属化工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electro-fluidic based micro ion optical ion selective apertures using PCBMEMS technology
The objective of the present studies is to apply alternative (non-silicon-based) microfabrication technologies to generation of atmospheric pressure ion optical devices. We have devised novel materials, processes, and designs for micro ion optical systems for control of ions within sources, and across apertures and conductance arrays. Patterned microstructures and geometries for flow and electrostatic field shaping are achieved using PCB-MEMS. The laminates we have designed and fabricated are based on liquid crystal polymers (LCP) with photodefinable bonding materials and various electroformed metals. The choice of PCBMEMS was driven by the requirement of a low investment process, a material capable of high levels of electronic systems integration, while providing a vacuum compatibility competitive to glass. Processes for shaping the polymer dielectric for fluid flow control and the metallization for electrical field control have been devised.
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