基于级联mzi的非热敏氮化硅4通道(去)多路复用器

International Photonics and OptoElectronics Meeting 2019 (OFDA, OEDI, ISST, PE, LST, TSA) Pub Date : 2019-11-11 DOI:10.1364/isst.2019.jw4a.63

Shiqi Tao, Qingzhong Huang, C. Zeng, J. Xia

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引用次数: 0

摘要

我们通过级联Mach-Zehnder干涉仪(MZIs)设计并实现了氮化硅(SiN)中的非热(解)多路复用器，在所有四个通道中都具有极低的热灵敏度<4.8 pm/°C。

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Athermal silicon nitride 4-channel (de-)multiplexer based on cascaded MZIs

We have designed and realized an athermal (de-)multiplexer in silicon nitride (SiN) by cascaded Mach–Zehnder interferometers (MZIs), demonstrating an extremely low thermal sensitivity <4.8 pm/°C for all the four channels.

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International Photonics and OptoElectronics Meeting 2019 (OFDA, OEDI, ISST, PE, LST, TSA)

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