激光沉积有源层气体传感器

ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) Pub Date : 1998-10-05 DOI:10.1109/ASDAM.1998.730233

F. Vysloužil, V. Myslík, M. Vrňata

{"title":"激光沉积有源层气体传感器","authors":"F. Vysloužil, V. Myslík, M. Vrňata","doi":"10.1109/ASDAM.1998.730233","DOIUrl":null,"url":null,"abstract":"This article is concerned with comparison of the properties of acetonate and oxidic layer prepared using the impulse laser ablation method, and subsequent deposition LAD. Optimal technical conditions were found for preparation of layers suitable for use as chemical sensors. The properties of the deposition layers were studied on the basis of their FTIR spectra and by measuring their electrical conductivity. Changes in the electrical conductivity were evaluated in connection with detection of a reducing atmosphere. The attaining of sensitivity of about 350 for 1000 ppm H/sub 2/ was amongst the best results obtained.","PeriodicalId":378441,"journal":{"name":"ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-10-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Gas sensors with laser-deposited active layers\",\"authors\":\"F. Vysloužil, V. Myslík, M. Vrňata\",\"doi\":\"10.1109/ASDAM.1998.730233\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This article is concerned with comparison of the properties of acetonate and oxidic layer prepared using the impulse laser ablation method, and subsequent deposition LAD. Optimal technical conditions were found for preparation of layers suitable for use as chemical sensors. The properties of the deposition layers were studied on the basis of their FTIR spectra and by measuring their electrical conductivity. Changes in the electrical conductivity were evaluated in connection with detection of a reducing atmosphere. The attaining of sensitivity of about 350 for 1000 ppm H/sub 2/ was amongst the best results obtained.\",\"PeriodicalId\":378441,\"journal\":{\"name\":\"ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-10-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASDAM.1998.730233\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.1998.730233","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文比较了脉冲激光烧蚀法制备的醋酸盐层和氧化层的性能，并对其进行了沉积。找到了制备适合用作化学传感器层的最佳工艺条件。通过FTIR光谱和电导率的测定，研究了沉积层的性能。电导率的变化与还原性气氛的检测有关。在1000ppm H/sub 2/条件下获得的灵敏度约为350是获得的最佳结果之一。

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Gas sensors with laser-deposited active layers

This article is concerned with comparison of the properties of acetonate and oxidic layer prepared using the impulse laser ablation method, and subsequent deposition LAD. Optimal technical conditions were found for preparation of layers suitable for use as chemical sensors. The properties of the deposition layers were studied on the basis of their FTIR spectra and by measuring their electrical conductivity. Changes in the electrical conductivity were evaluated in connection with detection of a reducing atmosphere. The attaining of sensitivity of about 350 for 1000 ppm H/sub 2/ was amongst the best results obtained.

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ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)

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