一个自动监控管理系统，有效的300毫米晶圆厂操作

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) Pub Date : 2001-10-08 DOI:10.1109/ISSM.2001.962924

Chung-Shen Wu, Da-Yin Liao

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引用次数: 0

摘要

本文介绍了一种有效的监控操作自动化系统(MOAS)，用于台积电300mm量产晶圆厂的自动监控管理。延续之前对300mm监控器自动化的研究，它通过集成先进的300mm CIM系统和功能来实现。MOAS显示了其作为实现复杂晶圆厂监控操作自动化的关键驱动因素的能力。

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An automatic monitor management system for effective 300 mm fab operations

This paper presents an effective monitor operations automation system (MOAS) which is being developed for automatic monitor management in a 300 mm mass production fab in tsmc. Continuing the previous study of on 300 mm monitor automation, it is implemented by integrating with advanced 300 mm CIM systems as well as functions. MOAS demonstrates its capability as a key driver to realize the automation of complex fab monitor operations.

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2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)

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