三元梳状硅光子晶体:氧化、本征模式、反射窗和对比度

2013 International Conference on Advanced Optoelectronics and Lasers (CAOL 2013) Pub Date : 2013-11-07 DOI:10.1109/CAOL.2013.6657525

E. Glushko

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引用次数: 0

摘要

在传递矩阵形式化的框架下，对三元光子晶体A/B/A/C周期结构进行了解析和数值研究。计算了氧化对(SiO2/Si/SiO2/Air)N结构的光子间隙和反射窗位置的影响。结果表明，在硅氧化过程中，本征光学对比度具有非单调性。发现的结果将允许确定最佳的氧化制度，以获得所需的光子器件性能。

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Ternary comb-like silicon photonic crystal: Oxidation, intrinsic modes, reflection windows and contrastivity

A ternary photonic crystal - A/B/A/C periodic structure is investigated analytically and numerically in the framework of transfer matrix formalism. The influence of oxidation to photonic gaps and positions of reflection windows for (SiO2/Si/SiO2/Air)N structure is calculated. It was shown that intrinsic optical contrastivity has a non-monotone behavior during the process of oxidation of silicon. The found results will allow to determine the optimal regimes of oxidation to obtain needed photonic device properties.

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2013 International Conference on Advanced Optoelectronics and Lasers (CAOL 2013)

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