M. Fujino, Hirotake Maruyama, Y. Goto, Michiko Nakanishi, A. Kobayashi, H. Kawashima, T. Yuasa, I. Ishinabe, H. Tamura
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A widely-variable optical attenuator for multimode fibers with a MEMS micromirror
MEMS-based variable optical attenuators (VOAs) using a shutter, a mirror, or a grating have been proposed in the field of optical telecommunication [1]. The MEMS-based VOAs used in optical telecommunication, however, are not suitable for optical instruments, in which a light beam is not always single mode ( i.e. is low spatially coherent) and optical power to be regulated can substantially vary (≫ 40 dB).
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