作为微型压力传感器的超薄柔性纳米复合膜

2009 IEEE Sensors Pub Date : 2009-10-01 DOI:10.1109/ICSENS.2009.5398186

V. Tsukruk, M. McConney

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引用次数: 0

摘要

测量由压力、重量、温度或化学相互作用的微小变化引起的膜的微观挠度正在发展成为最通用的传感方法之一。超薄薄膜正在成为各种传感器件的关键元件，如声学、压力微器件、化学和热传感器，本文都进行了讨论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Ultrathin flexible nanocomposite membranes as miniature pressure sensors

Measuring microscopic deflections of membranes caused by small changes in pressure, weight, temperature, or chemical interactions is developing into one of the most versatile sensing approaches. Ultra-thin membranes are emerging as critical elements in various sensing devices, such as acoustic, pressure microdevices, chemical and thermal sensors, all discussed in this paper.

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来源期刊

2009 IEEE Sensors

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