聚四氟乙烯和氯化锂对多孔阳极氧化氧化铝膜感湿性能的影响

Proceedings 2000 IEEE Hong Kong Electron Devices Meeting (Cat. No.00TH8503) Pub Date : 2000-06-24 DOI:10.1109/HKEDM.2000.904220

S. Chakraborty, P. Lai, C. Chakraborty

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引用次数: 0

摘要

研究了磷酸阳极氧化铝膜电容式湿度传感器的电学性能。测定了聚四氟乙烯沉积或氯化锂涂层多孔氧化铝膜的性能。发现聚四氟乙烯或氯化锂沉积后，多孔氧化铝膜的灵敏度提高。此外，铁氟龙沉积的氧化铝传感器具有更短的响应时间。

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Role of Teflon and LiCl on the humidity-sensing properties of porous anodized alumina film

The electrical properties of capacitive humidity sensors, based on an aluminium film anodized in phosphoric acid, are investigated. The properties of teflon-deposited or LiCl-coated porous alumina film are also measured. It is found that sensitivity of porous alumina film increases after teflon or LiCl deposition. Moreover, the teflon-deposited alumina sensor exhibits shorter response time.

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Proceedings 2000 IEEE Hong Kong Electron Devices Meeting (Cat. No.00TH8503)

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