J. Dziuban, A. Gorecka-Drzazga, K. Malecki, L. Nieradko, J. Mroz, M. Szczygielska
{"title":"气相色谱仪用硅元件","authors":"J. Dziuban, A. Gorecka-Drzazga, K. Malecki, L. Nieradko, J. Mroz, M. Szczygielska","doi":"10.1117/12.435932","DOIUrl":null,"url":null,"abstract":"A gas analyzer based on chromatography method using silicon- glass components has been built. Its main components were made by using MAMS-like technology, and its conception is concurrent to the idea of an integrated silicon chromatography proposed by SC Terry.","PeriodicalId":405495,"journal":{"name":"Optoelectronic and Electronic Sensors","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Silicon components for gas chromatograph\",\"authors\":\"J. Dziuban, A. Gorecka-Drzazga, K. Malecki, L. Nieradko, J. Mroz, M. Szczygielska\",\"doi\":\"10.1117/12.435932\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A gas analyzer based on chromatography method using silicon- glass components has been built. Its main components were made by using MAMS-like technology, and its conception is concurrent to the idea of an integrated silicon chromatography proposed by SC Terry.\",\"PeriodicalId\":405495,\"journal\":{\"name\":\"Optoelectronic and Electronic Sensors\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-08-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optoelectronic and Electronic Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.435932\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optoelectronic and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.435932","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A gas analyzer based on chromatography method using silicon- glass components has been built. Its main components were made by using MAMS-like technology, and its conception is concurrent to the idea of an integrated silicon chromatography proposed by SC Terry.