用liga工艺制备微传感器和微执行器元件

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148951

J. Mohr, P. Bley, C. Burbaum, W. Menz, U. Wallrabe

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引用次数: 17

摘要

将原始的liga工艺与牺牲层技术相结合，制备了可移动微结构，实现了微传感器和微执行器元件。作为可移动微结构的例子，电容式加速度传感器、微型涡轮和线性梳状驱动器已经被制造出来。介绍了它们的特性和有关其行为的结果。

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Fabrication of microsensor and microactuator elements by the LIGA-process

By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated. Their characteristics and results concerning their behavior are presented.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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