The Parametric Amplification in MEMS Gyroscopes Based on Triple Resonant Frequency Signal

The parametric resonances have been widely investigated in many mechanical resonators, and the drive frequencies for parametric amplification are generally twice the resonant frequencies in related studies. This paper presents the parametric amplification resulting from applying the parametric excitation signal of triple resonant frequency along with the drive signal of the fundamental frequency to a disk resonator gyroscope (DRG). Experimental results in the DRG demonstrate that the response amplitude of the gyroscope increases with the increment of the triple frequency voltage, and the effective quality factor has been improved by 4.9 times at the same time.