AlN/SiO2/Si、AlN/Si SAW滤波器结构新颖

2008 IEEE International Frequency Control Symposium Pub Date : 2008-05-19 DOI:10.1109/FREQ.2008.4623070

T. Hoang, P. Rey, M. Vaudaine, P. Robert, P. Benech

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引用次数: 8

摘要

本文研究了一种新型结构表面声波滤波器的设计与特性。给出了2P和3P结构SAW滤波器的模型。声表面波滤波器性能分析的主要研究课题是透射系数和反射系数随频率的变化。为此使用了网络分析仪HP 8753E。并对不同结构的声表面波滤波器进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A novel structure of AlN/SiO2/Si, AlN/Si SAW filter

This paper concerns the design and characterization of a novel structure surface acoustic wave (SAW) filter. The models for 2P and 3P configuration SAW filters are presented. The major subjects of interest for performance analysis of SAW filters are the transmission coefficient and reflection coefficient versus frequency. Network analyzer HP 8753E was used for this purpose. Comparisons between our novel structure and normal structure of different SAW filters are presented.

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2008 IEEE International Frequency Control Symposium

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