iii -氮化物光子中的低折射率包层

G. Subramania, N. Karl, K. Sapkota, George T. Wang, I. Brener, Zachary Meinelt, D. Feezell
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引用次数: 0

摘要

氮基光子晶体或超材料可以在可见光和紫外频率下工作,对许多纳米光子学应用具有重要意义。由于缺乏与Si和III-V系统不同的兼容的天然低折射率材料,在高折射率衬底GaN和有源层之间创建低折射率界面包层是这种基于iii -氮化物的光学纳米结构有效运行的一个关键挑战。本文将讨论利用电化学和光电化学蚀刻技术在iii -氮化物纳米光子器件中实现光学衬底隔离[j].光子学报,2018,8,3543。我们将描述利用这种光学隔离方法制造GaN纳米线阵列,并给出光学响应来证明这种方法的有效性。桑迪亚国家实验室由NTESS根据DOE NNSA合同DE-NA0003525进行管理和运营。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low refractive cladding in III-nitride photonics
III-Nitride based photonic crystals or metamaterials can operate in the visible and ultraviolet frequencies and are important for many nanophotonics applications. A key challenge in efficient operation of such III-nitride based optical nanostructures has been in creating a low refractive index interface cladding region between the high refractive index substrate GaN and the active layer due to a lack of compatible natural low index materials unlike those in Si and III-V systems. Here we will discuss achieving such optical substrate isolation in III-nitride nanophotonic devices using electrochemical and photo-electrochemical etching techniques [Opt. Mat. Exp. 2018, 8, 3543]. We will describe the fabrication of a GaN nanowire array utilizing this method of optical isolation and present the optical response to demonstrate the effectiveness of this approach. Sandia National Laboratories is managed and operated by NTESS under DOE NNSA contract DE-NA0003525.
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