{"title":"cMUT作为快速响应电子鼻气体传感器的特性研究","authors":"Boutonnet Charles, Vialletelle Adrien, Legoux Christophe, Bastien Jean-Claude, Blard Francois, Herrier Cyril, Livache Thierry, Fain Bruno","doi":"10.1109/SSI56489.2022.9901410","DOIUrl":null,"url":null,"abstract":"This work presents a characterization of CMUTs as promising candidates for a fast-response, miniaturized electronic nose. A complete setup has been designed, including MEMS chip and packaging, electromechanical valves and dedicated electronics. The measurements focus on the characterization of one channel to demonstrate satisfying sensitivities to some usual volatile organic compounds. The measurements exhibit fast-response to stimuli, highlighting how CMUTs could be a building block of an industrially suitable electronic nose.","PeriodicalId":339250,"journal":{"name":"2022 Smart Systems Integration (SSI)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Characterization of a cMUT as a gas sensor for a fast-response electronic nose\",\"authors\":\"Boutonnet Charles, Vialletelle Adrien, Legoux Christophe, Bastien Jean-Claude, Blard Francois, Herrier Cyril, Livache Thierry, Fain Bruno\",\"doi\":\"10.1109/SSI56489.2022.9901410\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents a characterization of CMUTs as promising candidates for a fast-response, miniaturized electronic nose. A complete setup has been designed, including MEMS chip and packaging, electromechanical valves and dedicated electronics. The measurements focus on the characterization of one channel to demonstrate satisfying sensitivities to some usual volatile organic compounds. The measurements exhibit fast-response to stimuli, highlighting how CMUTs could be a building block of an industrially suitable electronic nose.\",\"PeriodicalId\":339250,\"journal\":{\"name\":\"2022 Smart Systems Integration (SSI)\",\"volume\":\"6 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-04-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 Smart Systems Integration (SSI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SSI56489.2022.9901410\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 Smart Systems Integration (SSI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SSI56489.2022.9901410","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characterization of a cMUT as a gas sensor for a fast-response electronic nose
This work presents a characterization of CMUTs as promising candidates for a fast-response, miniaturized electronic nose. A complete setup has been designed, including MEMS chip and packaging, electromechanical valves and dedicated electronics. The measurements focus on the characterization of one channel to demonstrate satisfying sensitivities to some usual volatile organic compounds. The measurements exhibit fast-response to stimuli, highlighting how CMUTs could be a building block of an industrially suitable electronic nose.
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