射频等离子体辅助分子束外延生长InGaN/GaN量子阱结构中纳米蚀刻的应变松弛效应。

R. Vadivelu, A. Kikuchi, K. Kishino
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引用次数: 0

摘要

InGaN量子阱在应变诱导的压电场作用下,由于电子和空穴的空间分离,其从绿色到红色发射的IQE并不高。讨论了InGaN-QWs在纳米刻蚀下的应变松弛现象。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Strain relaxation effect by nano-pattern etching in InGaN/GaN quantum well structures grown by rf-plasma assisted molecular beam epitaxy.
The IQE of InGaN quantum-wells emit from green to red is not so high due to spatial separation of electrons and holes by strain-induced piezo-electric-field. The strain relaxation in InGaN-QWs by nano etching is discussed.
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