片上傅里叶变换光谱仪的功能微纳结构

M. Malak, K. Jefimovs, Irène Philipoussis, J. di Francesco, B. Guldimann, T. Scharf
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引用次数: 3

摘要

光谱分析可以使用各种光学微系统来实现。其中,我们可以引用:法布里-普氏干涉仪和迈克尔逊干涉仪,阵列波导光栅和驻波傅立叶变换光谱仪。近年来,人们对焦平面阵列光谱仪(FPAS)进行了小型化研究。据作者所知,这是关于实现基于微纳结构的紧凑型傅立叶变换光谱仪的第一份报告,该光谱仪将基于聚合物的集成光学电路与可移动的外镜相结合,以增加采样和高精度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Functional micro-nano structures for on-chip fourier transform spectrometers
Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.
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