柔性半导体器件:塑料指纹传感器和电泳显示[基于TFT]

Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) Pub Date : 2004-11-15 DOI:10.1109/ESSDER.2004.1356551

H. Takao, M. Miyasaka, H. Kawai, H. Hara, A. Miyazaki, T. Kodaira, S. Tam, S. Inoue, T. Shimoda

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引用次数: 8

摘要

我们正处于柔性半导体器件新时代的边缘。优秀的器件，如指纹传感器(FPS)和有源矩阵电泳显示器(AM-EPD)，是在塑料片上制造的，使用薄膜晶体管(TFT)技术。该器件首先在具有高性能低温加工多晶硅(LTPS) tft的玻璃基板上制造，然后转移到塑料片上。本文以柔性半导体器件为例，介绍了基于塑料的FPS和AM-EPD器件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Flexible semiconductor devices: fingerprint sensor and electrophoretic display on plastic [TFT based]

We are on the brink of a new era in flexible semiconductor devices. Outstanding devices, such as a fingerprint sensor (FPS) and an active-matrix electrophoretic display (AM-EPD), are fabricated on a plastic sheet, using thin film transistor (TFT) technology. The devices are first fabricated on a glass substrate with high-performance low-temperature processed polycrystalline silicon (LTPS) TFTs, then later transferred onto a plastic sheet. The FPS and AM-EPD devices on plastic are presented in this paper as examples of flexible semiconductor devices.

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Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850)

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