{"title":"硅基太赫兹介质波导","authors":"Q. Xue, Haotian Zhu, Jianan Hui, S. Pang","doi":"10.1109/APMC.2015.7411579","DOIUrl":null,"url":null,"abstract":"In this paper, four types of silicon based THz dielectric waveguide are introduced. The silicon based THz dielectric waveguides are all fabricated by DRIE technology. The losses of these dielectric waveguides are very low.","PeriodicalId":269888,"journal":{"name":"2015 Asia-Pacific Microwave Conference (APMC)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Silicon based THz dielectric waveguides\",\"authors\":\"Q. Xue, Haotian Zhu, Jianan Hui, S. Pang\",\"doi\":\"10.1109/APMC.2015.7411579\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, four types of silicon based THz dielectric waveguide are introduced. The silicon based THz dielectric waveguides are all fabricated by DRIE technology. The losses of these dielectric waveguides are very low.\",\"PeriodicalId\":269888,\"journal\":{\"name\":\"2015 Asia-Pacific Microwave Conference (APMC)\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-12-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 Asia-Pacific Microwave Conference (APMC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/APMC.2015.7411579\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Asia-Pacific Microwave Conference (APMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APMC.2015.7411579","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In this paper, four types of silicon based THz dielectric waveguide are introduced. The silicon based THz dielectric waveguides are all fabricated by DRIE technology. The losses of these dielectric waveguides are very low.
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