{"title":"一种电极优化设计的多频RF-MEMS谐振器","authors":"X. Kan, Zeji Chen, Q. Yuan, Fengxiang Wang, Jinling Yang, Fuhua Yang, X. Kan, Zeii Chen, Ouan Yuan, Fenzxianz Wanz, Jinling Yang, Fuhua Yang, X. Kan, Zeji Chen, Fengxiang Wang, Jinling Yang","doi":"10.1109/FCS.2018.8597524","DOIUrl":null,"url":null,"abstract":"This paper presents a novel multi-electrode Micro-electro-mechanical system (MEMS) disk resonator vibrating in the whispering gallery modes (WGM). Multi-mode resonance can simultaneously be driven with one pair of electrodes. The performance for each vibration mode strongly depends on the span angles of electrodes, and an optimized angle of 34° is obtained for a resonator of $37 \\mu \\mathrm{m}$ in radius. With the multi-electrodes configuration, multiple frequencies output of 56-176 MHz with high quality factor $(Q)$ around 10000 are attained for a $37 \\mu\\mathrm{m}$-radius disk resonator in atmosphere, which has a potential application in tunable multi-frequency RF oscillators and filters.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A Novel Multiple-Frequency RF-MEMS Resonator with Optimized Electrode Design\",\"authors\":\"X. Kan, Zeji Chen, Q. Yuan, Fengxiang Wang, Jinling Yang, Fuhua Yang, X. Kan, Zeii Chen, Ouan Yuan, Fenzxianz Wanz, Jinling Yang, Fuhua Yang, X. Kan, Zeji Chen, Fengxiang Wang, Jinling Yang\",\"doi\":\"10.1109/FCS.2018.8597524\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a novel multi-electrode Micro-electro-mechanical system (MEMS) disk resonator vibrating in the whispering gallery modes (WGM). Multi-mode resonance can simultaneously be driven with one pair of electrodes. The performance for each vibration mode strongly depends on the span angles of electrodes, and an optimized angle of 34° is obtained for a resonator of $37 \\\\mu \\\\mathrm{m}$ in radius. With the multi-electrodes configuration, multiple frequencies output of 56-176 MHz with high quality factor $(Q)$ around 10000 are attained for a $37 \\\\mu\\\\mathrm{m}$-radius disk resonator in atmosphere, which has a potential application in tunable multi-frequency RF oscillators and filters.\",\"PeriodicalId\":180164,\"journal\":{\"name\":\"2018 IEEE International Frequency Control Symposium (IFCS)\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE International Frequency Control Symposium (IFCS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FCS.2018.8597524\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Frequency Control Symposium (IFCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FCS.2018.8597524","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Novel Multiple-Frequency RF-MEMS Resonator with Optimized Electrode Design
This paper presents a novel multi-electrode Micro-electro-mechanical system (MEMS) disk resonator vibrating in the whispering gallery modes (WGM). Multi-mode resonance can simultaneously be driven with one pair of electrodes. The performance for each vibration mode strongly depends on the span angles of electrodes, and an optimized angle of 34° is obtained for a resonator of $37 \mu \mathrm{m}$ in radius. With the multi-electrodes configuration, multiple frequencies output of 56-176 MHz with high quality factor $(Q)$ around 10000 are attained for a $37 \mu\mathrm{m}$-radius disk resonator in atmosphere, which has a potential application in tunable multi-frequency RF oscillators and filters.
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