自旋涂覆聚酰亚胺薄膜介电特性研究

The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Pub Date : 2002-12-16 DOI:10.1109/ASDAM.2002.1088481

L. Matay

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引用次数: 3

摘要

在MPM系统中，用小电极测量了厚度为0.95 ~ 2.4 /spl mu/m的HTR-3和PAAC-16聚酰亚胺薄膜在50 kHz ~ 14 MHz频率范围内的介电性能。在室温下测量了聚酰亚胺HTR-3和PAAC-16在聚酰亚胺薄膜厚度约为1.4 /spl mu/m时的交流电导率与频率的关系。曲线有两个色散区，其中的斜率不同。在400 kHz频率范围内，介质损耗和耗散系数(tan /spl / delta/)减小。随着聚酰亚胺薄膜厚度的减小，介电常数减小。

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Studies of dielectric characteristics of spin-coated polyimide films

Dielectric properties of HTR-3 and PAAC-16 polyimide thin films with thickness ranging from 0.95 to 2.4 /spl mu/m have been measured in the frequency range from 50 kHz to 14 MHz by using a small electrode in MPM system. The frequency dependence of ac conductivity for polyimide HTR-3 and PAAC-16 with thickness of polyimide film about 1.4 /spl mu/m was measured at room temperature. The curves exhibit two dispersive regions in which they had different slope. The dielectric loss and dissipation factor (tan /spl delta/) decrease in the frequency range <400 kHz and increase in the frequency range >400 kHz. With decreasing polyimide film thickness, the dielectric constant decreased.

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The Fourth International Conference on Advanced Semiconductor Devices and Microsystem

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