用于ULSI无线互连的Si单极集成天线串扰隔离

Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695) Pub Date : 2003-06-02 DOI:10.1109/IITC.2003.1219740

A. Rashid, S. Watanabe, T. Kikkawa

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引用次数: 4

摘要

利用单极子集成天线对硅基无线互连进行了高频局部互连金属线串扰的研究。对于长度为3mm的天线，在相同长度且间隔为10 /spl mu/m的受害线上，在9 GHz时串扰最大值为-18 dB。通过使天线稍微远离谐振点，可以大幅度减少串扰。

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Crosstalk isolation of monopole integrated antenna on Si for ULSI wireless interconnect

Crosstalks on local interconnect metal lines at high frequency have been evaluated for wireless interconnect on Si using monopole integrated antenna. For an antenna of length 3 mm, the maximum value of crosstalk on a victim line of same length and separated by a distance of 10 /spl mu/m was found to be -18 dB at 9 GHz. Large reduction in crosstalk is possible by operating the antenna slightly off the resonance point.

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来源期刊

Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695)

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