微机械硅秤

1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254) Pub Date : 1998-07-06 DOI:10.1109/CPEM.1998.699805

T. Sillanpaa, A. Oja, H. Seppa

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引用次数: 3

摘要

介绍了一种新型微型电容秤。该装置是通过对单晶硅进行微加工实现的。我们的设计计算表明，一克的重量可以精确到百万分之一。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Micromechanical silicon scale

A novel miniature capacitive scale is described. The device is realized by micromachining single-crystalline silicon. Our design calculations show that it is possible to weigh one gram with an accuracy on the order of a part in million.

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来源期刊

1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254)

自引率

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