{"title":"节点支持的变焦镜像","authors":"Takashi Sasaki, Takuro Kamada, K. Hane","doi":"10.1109/OMN.2019.8925292","DOIUrl":null,"url":null,"abstract":"We propose and test a node supported varifocal mirror for high speed and large displacement actuation. The mirror diameter of fabricated device was 1 mm. The maximum quality factor was obtained at node supported condition. The resonant frequency and quality factor of the fabricated device were 391 kHz and 280 under the vacuum condition.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"919 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Node supported varifocal mirror\",\"authors\":\"Takashi Sasaki, Takuro Kamada, K. Hane\",\"doi\":\"10.1109/OMN.2019.8925292\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We propose and test a node supported varifocal mirror for high speed and large displacement actuation. The mirror diameter of fabricated device was 1 mm. The maximum quality factor was obtained at node supported condition. The resonant frequency and quality factor of the fabricated device were 391 kHz and 280 under the vacuum condition.\",\"PeriodicalId\":353010,\"journal\":{\"name\":\"2019 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"919 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2019.8925292\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2019.8925292","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We propose and test a node supported varifocal mirror for high speed and large displacement actuation. The mirror diameter of fabricated device was 1 mm. The maximum quality factor was obtained at node supported condition. The resonant frequency and quality factor of the fabricated device were 391 kHz and 280 under the vacuum condition.
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