镀钌触点簧片开关表面失活处理后氧化钌膜厚度

Proceedings of the Thirty Fifth Meeting of the IEEE Holm Conference on Electrical Contacts Pub Date : 1989-09-18 DOI:10.1109/HOLM.1989.77937

T. Yokokawa, T. Yano, C. Kawakita, K. Hinohara, T. Kobayashi

{"title":"镀钌触点簧片开关表面失活处理后氧化钌膜厚度","authors":"T. Yokokawa, T. Yano, C. Kawakita, K. Hinohara, T. Kobayashi","doi":"10.1109/HOLM.1989.77937","DOIUrl":null,"url":null,"abstract":"A precise analysis of ruthenium-plated contact surfaces was made to obtain information on the thickness of ruthenium oxide film. The thickness of ruthenium oxide film before and after high-temperature oxygen treatment was measured. As a result of investigation using ellipsometry and Auger electron spectroscopy, it was found that the thickness of ruthenium oxide film on the ruthenium-plated contact surface treated with oxygen at 450 degrees C optimum treatment temperature is approximately 50 AA and that the thickness increases as treatment temperature rises.<<ETX>>","PeriodicalId":441734,"journal":{"name":"Proceedings of the Thirty Fifth Meeting of the IEEE Holm Conference on Electrical Contacts","volume":"191 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Thickness of ruthenium oxide film produced by the surface deactivation treatment of ruthenium-plated contact reed switches\",\"authors\":\"T. Yokokawa, T. Yano, C. Kawakita, K. Hinohara, T. Kobayashi\",\"doi\":\"10.1109/HOLM.1989.77937\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A precise analysis of ruthenium-plated contact surfaces was made to obtain information on the thickness of ruthenium oxide film. The thickness of ruthenium oxide film before and after high-temperature oxygen treatment was measured. As a result of investigation using ellipsometry and Auger electron spectroscopy, it was found that the thickness of ruthenium oxide film on the ruthenium-plated contact surface treated with oxygen at 450 degrees C optimum treatment temperature is approximately 50 AA and that the thickness increases as treatment temperature rises.<<ETX>>\",\"PeriodicalId\":441734,\"journal\":{\"name\":\"Proceedings of the Thirty Fifth Meeting of the IEEE Holm Conference on Electrical Contacts\",\"volume\":\"191 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-09-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the Thirty Fifth Meeting of the IEEE Holm Conference on Electrical Contacts\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HOLM.1989.77937\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the Thirty Fifth Meeting of the IEEE Holm Conference on Electrical Contacts","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HOLM.1989.77937","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

对镀钌接触面进行了精确的分析，以获得氧化钌膜厚度的信息。测定了高温氧处理前后氧化钌膜的厚度。利用椭偏仪和俄格能谱分析发现，在450℃下经氧处理的钌表面氧化钌膜厚度约为50 AA，随着处理温度的升高，氧化钌膜厚度逐渐增大

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Thickness of ruthenium oxide film produced by the surface deactivation treatment of ruthenium-plated contact reed switches

A precise analysis of ruthenium-plated contact surfaces was made to obtain information on the thickness of ruthenium oxide film. The thickness of ruthenium oxide film before and after high-temperature oxygen treatment was measured. As a result of investigation using ellipsometry and Auger electron spectroscopy, it was found that the thickness of ruthenium oxide film on the ruthenium-plated contact surface treated with oxygen at 450 degrees C optimum treatment temperature is approximately 50 AA and that the thickness increases as treatment temperature rises.<>

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Proceedings of the Thirty Fifth Meeting of the IEEE Holm Conference on Electrical Contacts

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