{"title":"光学传感器用图案滤波器的研究进展","authors":"G. Ockenfuss, R. Sargent, F. V. Milligen","doi":"10.1364/OIC.2019.WA.1","DOIUrl":null,"url":null,"abstract":"The patterning of optical filters to enable sensors dates back more than 50 years. Today this technology serves numerous aerospace, industrial, and consumer electronics applications. Recent developments include the commercial adoption of processes for patterning filters directly onto CMOS wafers and the expansion of applications into multispectral sensing and imaging.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"120 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Progress in Patterned Filters for Optical Sensors\",\"authors\":\"G. Ockenfuss, R. Sargent, F. V. Milligen\",\"doi\":\"10.1364/OIC.2019.WA.1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The patterning of optical filters to enable sensors dates back more than 50 years. Today this technology serves numerous aerospace, industrial, and consumer electronics applications. Recent developments include the commercial adoption of processes for patterning filters directly onto CMOS wafers and the expansion of applications into multispectral sensing and imaging.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"120 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.WA.1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.WA.1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The patterning of optical filters to enable sensors dates back more than 50 years. Today this technology serves numerous aerospace, industrial, and consumer electronics applications. Recent developments include the commercial adoption of processes for patterning filters directly onto CMOS wafers and the expansion of applications into multispectral sensing and imaging.
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