{"title":"提前做好计划，以确保您的实验室满足高分辨率工具的要求","authors":"Steven B. Herschbein","doi":"10.31399/asm.edfa.2022-3.p055","DOIUrl":null,"url":null,"abstract":"\n This month’s guest columnist explains how some of the things he learned while building a new fab line helped him when he returned to the lab and assumed responsibility for buying and installing tools and ensuring their effective use.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Plan Well in Advance to Ensure Your Lab Meets High-Resolution Tool Requirements\",\"authors\":\"Steven B. Herschbein\",\"doi\":\"10.31399/asm.edfa.2022-3.p055\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n This month’s guest columnist explains how some of the things he learned while building a new fab line helped him when he returned to the lab and assumed responsibility for buying and installing tools and ensuring their effective use.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2022-3.p055\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2022-3.p055","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Plan Well in Advance to Ensure Your Lab Meets High-Resolution Tool Requirements
This month’s guest columnist explains how some of the things he learned while building a new fab line helped him when he returned to the lab and assumed responsibility for buying and installing tools and ensuring their effective use.
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