杂化电离系统的新概念

2015 37th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD) Pub Date : 2015-11-02 DOI:10.1109/EOSESD.2015.7314737

L. Levit, Geoffrey Weil

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引用次数: 1

摘要

提出了一种基于混合α和脉冲高压偏置电离器的新型电离器。它将电离器放置在处理室中，并通过仅使用电场的塑料窗对其进行远程偏置。它的性能几乎与这种与源硬连接的电离器相同。因为电路是一个电容器，电离器是自动平衡的，所以没有必要调整平衡。

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A novel new concept in hybrid alpha ionization systems

A novel ionizer invention based upon a hybrid alpha and pulsed high voltage bias ionizer is presented. It Places the ionizer in the process chamber and biases it remotely through a plastic window using only fields. It performs very nearly identically to such an ionizer with hard wiring to the source. Because the circuit is a capacitor, the ionizer is automatically balanced so there is no need to adjust the balance.

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来源期刊

2015 37th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD)

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