由直接激光写入实现的可重构纳米光子电路

H. Gehring, M. Blaicher, Thomas Grottke, W. Pernice
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引用次数: 0

摘要

通过光刻技术批量生产的无源集成纳米光子电路在纳米化后可定制性有限。在这里,我们提出了一种通过使用直接激光书写用于特定应用任务的光刻后重新配置纳米光子电路的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reconfigurable nanophotonic circuitry enabled by direct-laser-writing
Passive integrated nanophotonic circuits mass-produced by lithographic means offer limited customizability after nanofabrication. Here we present an approach for reconfiguring nanophotonic circuitry after lithography by using direct-laser-writing for application-specific tasks.
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