电容体声波硅盘陀螺仪

2006 International Electron Devices Meeting Pub Date : 2006-12-01 DOI:10.1109/IEDM.2006.346827

H. Johari, F. Ayazi

{"title":"电容体声波硅盘陀螺仪","authors":"H. Johari, F. Ayazi","doi":"10.1109/IEDM.2006.346827","DOIUrl":null,"url":null,"abstract":"This paper introduces the capacitive bulk acoustic wave (BAW) silicon disk gyroscope. The capacitive BAW disk gyroscopes operate in the frequency range of 2-8MHz, are stationary devices with vibration amplitudes less than 20nm, and achieve very high quality factors (Q) in low vacuum (and even in atmosphere), which simplifies their wafer-scale packaging. The device has lower operating voltages compared to low-frequency gyroscopes, which simplifies the interface circuit design and implementation in standard CMOS","PeriodicalId":366359,"journal":{"name":"2006 International Electron Devices Meeting","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"61","resultStr":"{\"title\":\"Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes\",\"authors\":\"H. Johari, F. Ayazi\",\"doi\":\"10.1109/IEDM.2006.346827\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper introduces the capacitive bulk acoustic wave (BAW) silicon disk gyroscope. The capacitive BAW disk gyroscopes operate in the frequency range of 2-8MHz, are stationary devices with vibration amplitudes less than 20nm, and achieve very high quality factors (Q) in low vacuum (and even in atmosphere), which simplifies their wafer-scale packaging. The device has lower operating voltages compared to low-frequency gyroscopes, which simplifies the interface circuit design and implementation in standard CMOS\",\"PeriodicalId\":366359,\"journal\":{\"name\":\"2006 International Electron Devices Meeting\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"61\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.2006.346827\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2006.346827","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 61

摘要

介绍了一种电容体声波(BAW)硅盘陀螺仪。电容式BAW盘式陀螺仪工作在2-8MHz的频率范围内，是振动幅度小于20nm的固定器件，并且在低真空(甚至在大气中)实现非常高的质量因数(Q)，从而简化了其晶圆级封装。与低频陀螺仪相比，该器件具有更低的工作电压，从而简化了标准CMOS接口电路的设计和实现

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Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes

This paper introduces the capacitive bulk acoustic wave (BAW) silicon disk gyroscope. The capacitive BAW disk gyroscopes operate in the frequency range of 2-8MHz, are stationary devices with vibration amplitudes less than 20nm, and achieve very high quality factors (Q) in low vacuum (and even in atmosphere), which simplifies their wafer-scale packaging. The device has lower operating voltages compared to low-frequency gyroscopes, which simplifies the interface circuit design and implementation in standard CMOS

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来源期刊

2006 International Electron Devices Meeting

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