{"title":"生物传感用绝缘体上硅法布里-珀罗腔马赫-曾德干涉仪","authors":"M. Mendez-Astudillo, H. Okayama, H. Nakajima","doi":"10.23919/MOC.2017.8244526","DOIUrl":null,"url":null,"abstract":"We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.","PeriodicalId":123743,"journal":{"name":"2017 22nd Microoptics Conference (MOC)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Mach-Zehnder interferometer with Fabry-Perot cavities in silicon-on-insulator for biosensing\",\"authors\":\"M. Mendez-Astudillo, H. Okayama, H. Nakajima\",\"doi\":\"10.23919/MOC.2017.8244526\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.\",\"PeriodicalId\":123743,\"journal\":{\"name\":\"2017 22nd Microoptics Conference (MOC)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 22nd Microoptics Conference (MOC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/MOC.2017.8244526\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 22nd Microoptics Conference (MOC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/MOC.2017.8244526","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mach-Zehnder interferometer with Fabry-Perot cavities in silicon-on-insulator for biosensing
We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.
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