{"title":"改进亚波长光栅槽波导光传感器最小特征尺寸","authors":"Can Ozcan, J. Aitchison, M. Mojahedi","doi":"10.1109/IPC53466.2022.9975740","DOIUrl":null,"url":null,"abstract":"We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.","PeriodicalId":202839,"journal":{"name":"2022 IEEE Photonics Conference (IPC)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improving Minimum Feature Sizes of Subwavelength Grating Slot Waveguide Optical Sensors\",\"authors\":\"Can Ozcan, J. Aitchison, M. Mojahedi\",\"doi\":\"10.1109/IPC53466.2022.9975740\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.\",\"PeriodicalId\":202839,\"journal\":{\"name\":\"2022 IEEE Photonics Conference (IPC)\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE Photonics Conference (IPC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPC53466.2022.9975740\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPC53466.2022.9975740","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.
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