{"title":"溶胶-凝胶法制备臭氧传感用In/sub 2/O/sub 3/薄膜","authors":"C. Jimenez, H.T. Sun, W. Wlodarski","doi":"10.1109/COMMAD.1996.610163","DOIUrl":null,"url":null,"abstract":"In/sub 2/O/sub 3/ thin films on sapphire substrates have been prepared from indium isopropoxide solutions by sol-gel process. Highly sensitive films have been obtained by using aged solutions and 500/spl deg/C annealing temperature. The electrical resistance increases greatly with increasing ozone concentration in the ppb range. The sol-gel-derived sensors have ozone sensitivity as large as 6 at 45 ppb, and working temperature below 200/spl deg/C.","PeriodicalId":171952,"journal":{"name":"1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Preparation of In/sub 2/O/sub 3/ thin films by sol-gel process for ozone sensing\",\"authors\":\"C. Jimenez, H.T. Sun, W. Wlodarski\",\"doi\":\"10.1109/COMMAD.1996.610163\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In/sub 2/O/sub 3/ thin films on sapphire substrates have been prepared from indium isopropoxide solutions by sol-gel process. Highly sensitive films have been obtained by using aged solutions and 500/spl deg/C annealing temperature. The electrical resistance increases greatly with increasing ozone concentration in the ppb range. The sol-gel-derived sensors have ozone sensitivity as large as 6 at 45 ppb, and working temperature below 200/spl deg/C.\",\"PeriodicalId\":171952,\"journal\":{\"name\":\"1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-12-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.1996.610163\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.1996.610163","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Preparation of In/sub 2/O/sub 3/ thin films by sol-gel process for ozone sensing
In/sub 2/O/sub 3/ thin films on sapphire substrates have been prepared from indium isopropoxide solutions by sol-gel process. Highly sensitive films have been obtained by using aged solutions and 500/spl deg/C annealing temperature. The electrical resistance increases greatly with increasing ozone concentration in the ppb range. The sol-gel-derived sensors have ozone sensitivity as large as 6 at 45 ppb, and working temperature below 200/spl deg/C.