基于冷阱和多次内反射FTIR的高灵敏度有机污染物检测方法[洁净室空气监测系统]

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) Pub Date : 2001-10-08 DOI:10.1109/ISSM.2001.963017

K. Maruo, Y. Maeda, M. Niwano

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引用次数: 0

摘要

提出了一种高灵敏度的洁净室空气有机污染物检测方法。利用傅里叶变换红外光谱(FTIR)，我们可以在几分钟内检测到包括有机污染物在内的各种化合物。此外，通过多次内反射(MIR)和冷阱(CT)两种有效方法的结合，化合物检测的灵敏度大大提高。经实验证明，该灵敏度可达ppb数量级。该方法将作为洁净室空气监测系统的一个组成部分。

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High-sensitive organic contaminants detecting method based on cold-trap and multiple-internal-reflection FTIR [clean room air monitoring systems]

This paper presents a high-sensitivity organic contaminants detection method for clean room air. Using a Fourier Transform Infra-Red spectroscopy (FTIR), we can detect various chemical compounds including organic contaminants in a few minutes. In addition, by combining two efficient methods: Multiple Internal Reflection (MIR) and Cold Trap (CT), the sensitivity rate of detection chemical compounds rises drastically. By conducting experiments, it has been demonstrated that this sensitivity rate reaches to the order of ppb. This method will be used as an integral part of clean room air monitoring systems.

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2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)

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