用于研究共面反电润湿振动传感和能量收集的试验结构

2023 35th International Conference on Microelectronic Test Structure (ICMTS) Pub Date : 2023-03-27 DOI:10.1109/ICMTS55420.2023.10094057

Anotidaishe Moyo, M. W. Shahzad, J. Terry, Stewart Smith, Y. Mita, Yifan Li

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引用次数: 0

摘要

介质上反电润湿(REWOD)是一种很有前途的低频振动能量收集技术。本研究旨在使用测试结构来表征一种独特的REWOD形式，使用共面电极配置。这种配置允许在系统集成，设备封装和应用程序更好的多功能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Test Structures for Studying Coplanar Reverse- Electrowetting for Vibration Sensing and Energy Harvesting

Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.

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来源期刊

2023 35th International Conference on Microelectronic Test Structure (ICMTS)

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