MEMS温度稳定

D. B. Pazychev, R. N. Sadekov
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引用次数: 1

摘要

本文讨论了一种利用传感器的温度稳定系统来减小MEMS传感器温度相关误差的方法。本文介绍了一个全尺寸实验的结果,与传统的温度误差补偿方法相比,该传感器的精度特性得到了提高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MEMS Temperature Stabilization
The article discusses a method for reducing the MEMS sensor temperature-dependent errors, using the temperature stabilization system of the sensor. The article presents the results of a full-scale experiment confirming the improved accuracy characteristics of the sensor in comparison with the traditional method of compensation for temperature errors.
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