石墨烯基纳米器件线性阵列的单转移制备方法

Hengkai Zhang, Xin Tang, Guangfu Wu, K. Lai
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引用次数: 0

摘要

在本文中,我们报道了一种新的制造方法,通过一次转移工艺在单芯片上制作基于石墨烯的线性阵列纳米器件。该方法能够在具有预定义电极的衬底上转移许多石墨烯薄片。这种方法可以在单个芯片上高效地制造多个基于石墨烯的纳米器件。将化学气相沉积生长的石墨烯图像化成M × N阵列,并通过转移工艺将该阵列转移到单个芯片上。电学测量结果表明,纳米器件的电学特性具有高度的一致性和稳定性。此外,单转移方法可用于制造各种纳米器件。该方法具有实现大规模生产石墨烯基生物传感器的巨大潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Single-transfer method for fabrication of linear array of graphene-based nanodevices
In this paper, we report a novel fabrication method to make linear array of graphene based nanodevices on a single chip by one single-transfer process. The method enables transferring of a number of graphene flakes on a substrate with predefined electrodes. This method enables efficient fabrication of multiple graphene based nanodevices on single chip. Chemical vapor deposition grown graphene was patterned into M × N array, and the array can be transferred to a single chip by the transfer process. The electrical measurement results show that the electrical characteristics of the nanodevices are highly consistent and stable. Furthermore, the single-transfer method can be applied in fabricating various kinds of nanodevices. The method would have great potential to realize large-scale production of graphene based biosensors.
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