紧凑的反设计集成1 × 3氮化硅平衡光功率分配器

2022 IEEE Photonics Conference (IPC) Pub Date : 2022-11-01 DOI:10.1109/IPC53466.2022.9975711

J. Slaby, A. Hammond, S. Ralph

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引用次数: 0

摘要

我们设计了一个紧凑的集成氮化硅1 × 3平衡光功率分配器，使用基于密度的拓扑优化和内置的制造约束。我们在商业铸造工艺上实验验证了我们的设计，分裂比为30-36- 33%，两个晶圆之间的插入损耗为2.48 dB。

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Compact Inverse Designed Integrated 1 x 3 Silicon Nitride Balanced Optical Power Splitter

We designed a compact integrated Silicon Nitride 1 x 3 balanced optical power splitter using density-based topology optimization with built-in fabrication constraints. We experimentally validate our design on a commercial foundry process with a splitting ratio of 30-36-33 % and an insertion loss of 2.48 dB across two wafers.

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2022 IEEE Photonics Conference (IPC)

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