基于原位干涉测量的8×8 MEMS镜像阵列闭环相位控制

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318845

T. Chan, M. Megens, B. Yoo, C. Chang-Hasnain, Ming C. Wu, D. Horsley

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引用次数: 0

摘要

我们演示了闭环控制的MEMS相控阵使用光学干涉仪设计的原位相位测量。相位分辨率可与商用干涉仪相媲美，无需校准即可实现波束导向。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry

We demonstrate closed-loop control of a MEMS phased array using an optical interferometer designed for in-situ phase-measurement. Phase resolution is comparable with commercial interferometers and we achieve beamsteering without calibration.

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2012 International Conference on Optical MEMS and Nanophotonics

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