Magneto-FEM analysis for micro actuator using array of magnetic elements

This paper reports a magnetic actuator using interaction between micro magnetic elements. It was already reported that the present actuator can work even if the structure was miniaturized to nano-scale. In the present work, simple fabrication process with photolithography and PDMS casting was employed to obtain beam type structures with micro array of magnetic elements on their surface. Two samples with simple grid patterns were prepared for testing. These samples had the same grid pattern but different orientation, which caused directly opposite bending deformation under the same applied magnetic field. We used magneto finite element method (FEM) to explain the behavior of the present actuators.