300mm竖炉小批量生产和集成计量的周期时间优势

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) Pub Date : 2001-10-08 DOI:10.1109/ISSM.2001.963003

R. Noben, R. van Driel, T. Claasen-Vujcic

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引用次数: 11

摘要

为了缩短炉区循环时间，对两种方案进行了评价。小批量生产和集成计量都可以节省宝贵的时间。动态仿真研究了两种方案的影响。结果是，从大批量生产到小批量生产，周期时间得到了改善。普通批次晶圆的增益可达40%，热批次晶圆的增益可达30%。其结果是所需试管数量的增加。分析了周期时间改进与成本的关系。确定了一小时周期时间增益的成本。综合计量可以节省大约5-10%的平均周期时间。

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Cycle time advantages of mini batch manufacturing and integrated metrology in a 300 mm vertical furnace

In order to improve cycle time in the furnace area, two alternatives are evaluated. Mini batch manufacturing and integrated metrology can both save valuable time. Dynamic simulations are used to investigate the influence of both options. The results are a cycle time improvement when going front large batch to mini batch manufacturing. The gain is up to 40% for normal lots and up to 30% for hot lots wafers. The consequence is an increase in the number of required tubes. Cycle time improvement versus costs is analysed. The cost of one hour cycle time gain is determined. Integrated metrology can save approximately 5-10% on the average cycle time.

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2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)

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