基于二维积分柱的小型化非色散红外CO2传感器

Optical Sensors and Sensing Congress (ES, FTS, HISE, Sensors) Pub Date : 2019-06-25 DOI:10.1364/SENSORS.2019.STU3C.5

X. Jia, G. Roelkens, R. Baets, J. Roels

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引用次数: 1

摘要

我们提出了一种基于二维积分圆柱体的新型小型化NDIR CO2传感器，该传感器采用深度RIE和硅晶圆键合技术实现。该传感器的检测限低至~ 250ppm，占地面积很小，仅为~ 5mm × 5mm。

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A miniaturized non-dispersive infrared CO2 sensor based on a 2D integrating cylinder

We propose a novel, miniaturized NDIR CO2 sensor based on a 2D integrating cylinder, realized using deep RIE and wafer bonding on silicon. The sensor has a detection limit down to ∼ 250ppm, with a small footprint of only ∼ 5mm × 5mm.

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Optical Sensors and Sensing Congress (ES, FTS, HISE, Sensors)

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