薄膜类金刚石碳电介质

Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop. Pub Date : 2002-06-30 DOI:10.1109/MODSYM.2002.1189471

R. Wu, H. Kosai, M. Freeman, G. Schwarze, S. F. Carr, J. Weimer

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引用次数: 2

摘要

介绍了一种高能量密度、高体积效率类金刚石(DLC)电容器的原型制造技术。设计、开发和构建了一套独特的双离子束沉积和卷筒网处理系统。高质量的DLC薄膜直接沉积在电容器级铝箔的两侧，采用连续进料方式。两个6 cm /spl倍/ 22 cm线性射频(13.56 MHz)电感耦合离子源产生了高效的碳氢化合物离子。双离子枪系统安装在100级洁净室环境中。然后通过在卷绕系统中轧制一对涂有DLC涂层的铝箔来生产高性能DLC电容器。

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Thin film diamond-like carbon dielectrics

A prototype manufacturing technology for high energy density and high volumetric efficiency diamond-like carbon (DLC) capacitors has been demonstrated. A unique dual ion-beam deposition and web-handling system has been designed, developed and constructed. The high quality DLC films were directly deposited on the both sides of the capacitor grade aluminum foil in a continuous feed mode. The highly efficient hydrocarbon ions were produced by two 6 cm /spl times/ 22 cm linear RF (13.56 MHz) inductively coupled ion sources. The dual ion gun system is housed in a class 100 clean room environment. The high performance DLC capacitors were then produced by rolling a pair of DLC-coated aluminum foils in a winding system.

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Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop.

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