成本效益和高密度集成监测光电探测器阵列上的聚合物导波组件

1998 Proceedings. 48th Electronic Components and Technology Conference (Cat. No.98CH36206) Pub Date : 1998-05-25 DOI:10.1109/ECTC.1998.678837

J. van der Linden, P. van Daele, P. D. De Dobbelaere, M. Diemeer

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引用次数: 1

摘要

我们报告了一种混合耦合概念，该概念允许通过带有集成镜子的微机械底座将顶部照明光电探测器阵列与基于聚合物导波的光网络组件高密度集成。在聚合物层堆栈中蚀刻互补对准结构允许被动组装，其1.0 dB对准公差范围约为40 /spl mu/m。集成直单模聚合物波导阵列的8通道探测器模块在1300 nm处的耦合效率约为-7.7 dB，相邻通道间的平均串扰值为-21.3 dB。

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Cost-effective and high-density integration of monitoring photodetector arrays onto polymeric guided-wave components

We report on a hybrid coupling concept which allows high-density integration of top illuminated photodetector arrays with polymeric guided-wave based optical network components by means of a micromachined submount with an integrated mirror. The etching of a complementary alignment structure into the polymeric layer stack allows passive assembly with a 1.0 dB alignment tolerance range of about 40 /spl mu/m. A prototype 8-channel detector module integrated with a straight single mode polymeric waveguide array exhibited a coupling efficiency of about -7.7 dB and an average crosstalk value of -21.3 dB between adjacent channels at 1300 nm.

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来源期刊

1998 Proceedings. 48th Electronic Components and Technology Conference (Cat. No.98CH36206)

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